The monograph examines the processes of formation of multicomponent films and nanocrystals based on materials of various natures using methods of ultra-high vacuum deposition, molecular beam epitaxy, low-energy ion implantation in combination with annealing (thermal and laser). The main mechanisms of nanostructure formation, technological routes for the production of nanocrystals and nanofilms, as well as their possible areas of application are presented. The book is intended for researchers, doctoral students, graduate students, and undergraduates specializing in the field of condensed matter physics and solid surfaces, as well as physical electronics and materials science.
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