Nanoimprint Lithography: An Enabling Process for Nanofabrication

By Weimin Zhou

Book Overview

Principles and statues of nanoimprint lithography.- Stamp Fabrication.- stamp surface treatment.- Nanoimprint lithography resists.- Nanoimprint lithography process.- Modeling and Simulation of NIL.- Application of NIL in Light emitting Diodes.- Application of NIL in memory devices.- Application of NIL in solar cell.

• Format: Paperback
• Language: English
• ISBN: 3662510863
• ISBN13: 9783662510865
• Release Date: August 2016
• Publisher: Springer
• Length: 249 Pages
• Weight: 0.85 lbs.
• Dimensions: 0.6" x 6.1" x 9.2"