Nanoimprint Lithography: An Enabling Process for Nanofabrication

By Weimin Zhou

Book Overview

Principles and statues of nanoimprint lithography.- Stamp Fabrication.- stamp surface treatment.- Nanoimprint lithography resists.- Nanoimprint lithography process.- Modeling and Simulation of NIL.-... This description may be from another edition of this product.

• Format: Hardcover
• Language: English
• ISBN: 3642344275
• ISBN13: 9783642344275
• Release Date: January 2013
• Publisher: Springer
• Length: 249 Pages
• Weight: 1.45 lbs.
• Dimensions: 0.8" x 6.3" x 9.2"