Nanofabrication: Principles, Capabilities and Limits

By Zheng Cui

Book Overview

1. Introduction.- 2. Nanofabrication by Photons.- 3. Nanofabrication by Electron Beam.- 4. Nanofabrication by Ion Beam.- 5. Nanofabrication by Scanning Probes.- 6. Nanofabrication by Replication.- 7. Nanoscale Pattern Transfer by Etching.- 8. Nanoscale Pattern Transfer by Deposition.- 9. Indirect Nanofabrication.- 10. Nanofabrication by Self-Assembly.- 11. Applications of Nanofabrication Technologies.

• Format: Paperback
• Language: English
• ISBN: 3319818759
• ISBN13: 9783319818757
• Release Date: June 2018
• Publisher: Springer
• Length: 432 Pages
• Weight: 1.38 lbs.
• Dimensions: 0.9" x 6.1" x 9.2"