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Paperback Modeling and Feedback Control of Mems Devices Book

ISBN: 3659322865

ISBN13: 9783659322860

Modeling and Feedback Control of Mems Devices

Micro-electromechanical systems (MEMS) are micromachines that allow computation, sensing, mobility, and manipulation at small scales down to the size of microns. During the past decade, MEMS... This description may be from another edition of this product.

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Format: Paperback

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Engineering Technology

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