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Microsensors: Principles and Applications
Edition Description
The main microsensors described here are made using conventional thick and thin film technologies as well as more recent methods such as silicon micromachining. Following a chapter on basic signal processing, the book concentrates on microsensors-the processing of materials for...
Edition Details
Format:Paperback
Language:English
ISBN:0471941360
Format: Paperback
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Microsensors: Principles and Applications
Edition Description
The main microsensors described here are made using conventional thick and thin film technologies as well as more recent methods such as silicon micromachining. Following a chapter on basic signal processing, the book concentrates on microsensors--the processing of materials...
Edition Details
Format:Hardcover
Language:English
ISBN:0471941352
Format: Hardcover
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