
This is the most comprehensive book on the basics, realization and applications of micromechanical photonics. Its purpose is to give the engineering student and the practical engineer a systematic introduction to optical MEMS (Micro electro mechanical systems) and micromechanical...

This is the most comprehensive book on the basics, realization and applications of micromechanical photonics. Its purpose is to give the engineering student and the practical engineer a systematic introduction to optical MEMS (Micro electro mechanical systems) and micromechanical...