Microlithography: Science and Technology

Like the bestselling original, this third edition of Microlithography is a self-contained text detailing both elementary and advanced aspects of submicron microlithography, offering a balanced treatment of theoretical and operating practices.

• Format: Hardcover
• Language: English
• ISBN: 1439876754
• ISBN13: 9781439876756
• Release Date: May 2020
• Publisher: CRC Press
• Length: 838 Pages
• Weight: 2.95 lbs.
• Dimensions: 1.6" x 7.1" x 10.1"