Microelectronic Materials

By C.R.M. Grovenor

Book Overview

This practical book shows how an understanding of structure, thermodynamics, and electrical properties can explain some of the choices of materials used in microelectronics, and can assist in the design of new materials for specific applications. It emphasizes the importance of the phase chemistry of semiconductor and metal systems for ensuring the long-term stability of new devices. The book discusses single-crystal and polycrystalline silicon, aluminium- and gold-based metallisation schemes, packaging semiconductor devices, failure analysis, and the suitability of various materials for optoelectronic devices and solar cells.

• Format: Paperback
• Language: English
• ISBN: 0852742703
• ISBN13: 9780852742709
• Release Date: January 1989
• Publisher: Routledge
• Length: 544 Pages
• Weight: 1.70 lbs.
• Dimensions: 1.2" x 6.2" x 9.3"

Customer Reviews

very compehensive, but somewhat outdated

This book is about materials used in silicon integrated circuit technology, and about the problems and issues related to each individual material. Although it covers some basic physics of semiconductor devices, including optoelectronic devices (LEDs) and solar cells, 70% of the book is about growth of silicon (bulk crystals and thin films), metallization (i.e., interconnect technology), deposition of insulating films, and packaging. I read several chapters which I was most interested in, and was very satisfied - it was a very rewarding, informative, and time-efficient reading. C.R.M.Grovenor has indeed made a great job of presenting the material and selecting illustrations in this very good textbook, useful for readers with any background in materials science. The only reason why I rated it "4 stars" is that semiconductor industry has changed a lot since this book was published in 1989. While the fundamental science-related chapters are not affected that much, the technologically-oriented parts do not reflect state-of-the-art technology anymore. Therefore it is helpful to have an overall idea what technology and materials are used now to distinguish the data which is still relevant from that which is outdated. Just to give a few examples, metallization technology is confined in this book to aluminum only (there is no mentioning of copper metallization which is now taking over); 30 nm SiO_2 layers are called "very thin" (now "very thin" is less than 3-4 nm); dendritic web and EFG polycrystalline silicon solar cells are quoted to have an efficiency of less than 1% (presently it is 12-15% for the same materials), etc. Despite all this, I am sure that this book deserves attention of materials science students. It was a very good book when it was published, and it is still good, although it requires a critical attitude.