Recent advances in microfabrication technology (microelectromechanical systems, MEMS) have provided a unique opportunity to fabricate miniature biomedical devices for a variety of applications ranging from implantable drug delivery systems and lab-on-a-chip to neural prosthetics. The digital capabilities of MEMS may allow greater temporal control over drug release compared to traditional polymer-based systems, while the batch-processing techniques used in the microelectronics industry can lead to greater device uniformity and reproducibility than is currently available to the pharmaceutical industry. MEMS offer revolutionary opportunities to address unmet medical needs related to dosing. Due to the complete control over drug release MEMS devices meets the requirements for on-demand pulsatile or adjustable continuous administration for extended periods. This chapter will provide snapshots of the important aspects of MEMS like fabrication strategies, applications in drug delivery, essential components, and products on market/under clinical trial. Since the MEMS are implanted on human bodies the driving power source with driving methodology and bio-compatibility are the two key issues that a great deal of researchers are truly concerned. So in this chapter we will also address the biocompatibility issue.
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