Micro and Nanomanufacturing

by Mark J. Jackson

Book Overview

The aim and scope of this book is to focus on providing the industrial and research community with a single source of information on micro and nanofabrication techniques. as they apply to a variety of engineering materials. The hands-on material in the book shows how to apply established and research based laboratory manufacturing techniques as they apply to a variety of engineering materials including silicon.

• Format: Paperback
• Language: English
• ISBN: 1441938451
• ISBN13: 9781441938459
• Release Date: October 2010
• Publisher: Springer
• Length: 702 Pages
• Weight: 2.16 lbs.
• Dimensions: 1.7" x 6.1" x 9.1"