Micro and Nano Fabrication: Tools and Processes

By Volker Saile, Juerg Leuthold, Jurg Leuthold, et al.

Book Overview

Introduction-MEMS, a Historical Perspective.- Vacuum Technology.- Deposition Technologies.- Etching Technologies.- Doping and Surface Modification.- Lithography.- LIGA.- Nanofabrication by Self-Assembly.- Enabling Technologies I - Wafer Planarization and Bonding.- Enabling Technologies II - Contamination Control.- Device Fabrication - An Example.

• Format: Paperback
• Language: English
• ISBN: 3662508265
• ISBN13: 9783662508268
• Release Date: October 2016
• Publisher: Springer
• Length: 519 Pages
• Weight: 1.67 lbs.
• Dimensions: 1.1" x 6.1" x 9.2"