Micro- and Nanofabrication for Beginners

By Eiichi Kondoh

In this book, the fundamentals of micro- and nanofabrication are described on the basis of the concept of "using gases as a fabrication tool." Necessary theories are plainly explained to help the reader learn about this new attractive field and enable further reading of specialized books.

• Format: Hardcover
• Language: English
• ISBN: 9814877093
• ISBN13: 9789814877091
• Release Date: June 2021
• Publisher: Jenny Stanford Publishing
• Length: 226 Pages
• Weight: 1.35 lbs.
• Dimensions: 0.7" x 6.0" x 9.1"