Method of manufacturing semiconductor device: United States Patent 9970107

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Method of manufacturing semiconductor device: U...

Edition Description

A technique for forming a metal film having a high work function while suppressing an increase in EOT is provided. According to the technique, there is provided a method of manufacturing a semiconductor device, including: (a) performing a first cycle a first number of times to...

Edition Details

Format:Paperback

Language:English

ISBN:B08RH2G26V

Format: Paperback

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Method of manufacturing semiconductor device: U...

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