Metal Impurities in Silicon-Device Fabrication

By Klaus Graff

Book Overview

This up-to-date monograph provides a thorough review of the relevant data and properties of the transition-metal impurities generated during silicon-sample and device fabrication. The different... This description may be from another edition of this product.

• Format: Paperback
• Language: English
• ISBN: 3642629652
• ISBN13: 9783642629655
• Release Date: October 2012
• Publisher: Springer
• Length: 270 Pages
• Weight: 0.91 lbs.
• Dimensions: 0.6" x 6.1" x 9.2"