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Metal Impurities in Silicon-Device Fabrication
By Klaus Graff
Edition Description
This up-to-date monograph provides a thorough review of the relevant data and properties of the transition-metal impurities generated during silicon-sample and device fabrication. The different mechanisms responsible for contamination are discussed, and a survey is given of their...
Edition Details
Format:Hardcover
Language:English
ISBN:3540642137
Format: Hardcover
Condition:
$
109.99
Metal Impurities in Silicon-Device Fabrication ...
By Klaus Graff
Edition Details
Format:Hardcover
Language:English
ISBN:0387583173
Format: Hardcover
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Metal Impurities in Silicon-Device Fabrication
By Klaus Graff
Edition Description
This up-to-date monograph provides a thorough review of the relevant data and properties of the transition-metal impurities generated during silicon-sample and device fabrication. The different mechanisms responsible for contamination are discussed, and a survey is given of their...
Edition Details
Format:Paperback
Language:English
ISBN:B01A96YZGE
Format: Paperback
Temporarily Unavailable
0 people are interested in this title.
We receive fewer than 1 copy every 6 months.
Metal Impurities in Silicon-Device Fabrication
By Klaus Graff
Edition Details
Format:Paperback
Language:English
ISBN:3642629652
Format: Paperback
Condition:
$
109.99
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