MEMS device for detection of cancer cells

By Shobha Gupta

MEMS, the acronym of "Micro Electro Mechanical Systems", are generally considered

as micro systems consisting of micro mechanical sensors, actuators and microelectronic circuits

integrated in a single chip. Micro means one millionth (1/1000000). A thickness of a human

hair is 100 times than that of a micron 1]. This means that it is an extremely small value

and so its fabrication needs to be taken intensive care of.

As microelectronics is a well-developed technology, the research and development of MEMS is

concentrated on the research and development of micro mechanical

sensors and actuators, or micro electromechanical transducers.

• Format: Paperback
• Language: English
• ISBN: 1835800076
• ISBN13: 9781835800072
• Release Date: October 2023
• Publisher: Self Publish
• Length: 86 Pages
• Weight: 0.28 lbs.
• Dimensions: 0.2" x 6.0" x 9.0"