
Contents; Preface; About the Authors; 1 Using Precise Mechanisms in Modern Vacuum Technological Equipment;References; 2 Typical Vacuum Mechanisms; 2.1 Functions of Vacuum Mechanisms 2.2 Rotary-Motion Feedthroughs; 2.3 Linear-Motion Feedthrough; 2.4 Manipulators; 2.5 Micro Mechanisms;...

Contents; Preface; About the Authors; 1 Using Precise Mechanisms in Modern Vacuum Technological Equipment;References; 2 Typical Vacuum Mechanisms; 2.1 Functions of Vacuum Mechanisms 2.2 Rotary-Motion Feedthroughs; 2.3 Linear-Motion Feedthrough; 2.4 Manipulators; 2.5 Micro Mechanisms;...