Materials Science in Microelectronics I: The Relationships Between Thin Film Processing and Structure

By Eugene S. Machlin

Thin films play a key role in the material science of microelectronics, and the subject matter of thin-films divides naturally into two headings: processing / structure relationship, and structure / properties relationship.The first volume of Materials Science in Microelectronics focuses on the first relationship - that between processing and the structure of the thin-film. The state of the thin film's surface during the period that one monolayer exists - before being buried in the next layer - determines the ultimate structure of the thin film, and thus its properties. This volume takes into consideration the following potential influencing factors: crystal defects, void structure, grain structure, interface structure in epitaxial films, the structure of amorphous films, and reaction-induced structure.An ideal text or reference work for students and researchers in material science, who need to learn the basics of thin films.

• Format: Hardcover
• Language: English
• ISBN: 008044640X
• ISBN13: 9780080446400
• Release Date: November 2005
• Publisher: Elsevier Science
• Length: 256 Pages
• Weight: 1.20 lbs.
• Dimensions: 0.8" x 6.1" x 9.3"