MEMS: Materialogy & Nanotechnology - discusses MEMS with Materialogy & Nanotechnology Theories as Masters Degree level subject. The book introduces first the most accepted MEMS concepts such as design, fabrication and devices, then Nanotechnology concepts such as properties, synthesis and characterization, and finally Basics for MEMS & Nanotechnology such as multiphysics, quantum confinement, etc. The book is divided into seven chapters - 3 on MEMS, 2 on Nanotechnology and 2 on Basics. This book is intended mainly to serve as a textbook for ME (Mechatronics Engineering) and as reference book for BE (Mechanical, Automobile & Aeronautical Engineering), BE & ME (Nanotechnology), and M.Sc.(Nanotechnology). It is my hope that book will become an invaluable source of essential information for academic, industrial, and governmental researchers and others interested in MEMS & Nanotechnology.
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