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Lpcvd Silicon Nitride and Oxynitride Films: Materials and Applications in Integrated Circuit Technology (Lecture Notes in Computer Science)
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Lpcvd Silicon Nitride and Oxynitride Films: Mat... 0387539549 Book Cover

Lpcvd Silicon Nitride and Oxynitride Films: Mat...

Edition Description

The present book collects a broad overview of chemical and physical char- acteristics of silicon oxynitrides. Special emphasis is put on the way in which these properties influence the electrical characteristics and behaviour of this important material. The results presented...

Edition Details
Format:Paperback
Language:English
ISBN:0387539549
Format: Paperback
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