Lpcvd Silicon Nitride and Oxynitride Films: Material and Applications in Integrated Circuit Technology

This volume, based on work done in an ESPRIT project, gives a broad overview of the chemical and physical characteristics of silicon oxynitrides, emphasizing how they influence the electrical behavior of this material, which is important for integrated circuit technology.

• Format: Paperback
• Language: English
• ISBN: 3540539549
• ISBN13: 9783540539544
• Release Date: May 1991
• Publisher: Springer
• Length: 159 Pages
• Weight: 0.62 lbs.
• Dimensions: 0.4" x 6.7" x 9.6"