Low Dielectric Constant Materials for IC Applications

By Paul S. Ho

Low dielectric materials are an important component of microelectronic devices. In this carefully edited volume the leading researchers give an introduction to and a survey of the various fields of dielectrics for IC integration. The book appeals to materials reserachers, electrical engineers and advanced students.

• Format: Hardcover
• Language: English
• ISBN: 3540678190
• ISBN13: 9783540678199
• Release Date: November 2002
• Publisher: Springer
• Length: 310 Pages
• Weight: 1.31 lbs.
• Dimensions: 0.7" x 6.4" x 9.7"