Lithography Process Control (SPIE Tutorial Texts in Optical Engineering Vol. TT28)

By Harry J. Levinson

This tutorial text covers lithography process control at several levels, from fundamental through advanced topics. A basic familiarity with lithography science is assumed. The book is intended to be a... This description may be from another edition of this product.

• Format: Paperback
• Language: English
• ISBN: 0819430528
• ISBN13: 9780819430526
• Release Date: March 1999
• Publisher: SPIE Publications
• Length: 204 Pages
• Weight: 0.95 lbs.
• Dimensions: 10.3" x 0.5" x 7.3"