Laser Annealing Processes in Semiconductor Technology: Theory, Modeling and Applications in Nanoelectronics

Laser Annealing Processes in Semiconductor Technology: Theory, Modeling and Applications in Nanoelectronics synthesizes the scientific and technological advances of laser annealing processes for current and emerging nanotechnologies. The book provides an overview of the laser-matter interactions of materials and recent advances in modeling of laser-related phenomena, with the bulk of the book focusing on current and emerging (beyond-CMOS) applications. Reviewed applications include laser annealing of CMOS, group IV semiconductors, superconducting materials, photonic materials, 2D materials. This comprehensive book is ideal for post-graduate students, new entrants, and experienced researchers in academia, research and development in materials science, physics and engineering.

• Format: Paperback
• Language: English
• ISBN: 0128202556
• ISBN13: 9780128202555
• Release Date: May 2021
• Publisher: Woodhead Publishing
• Length: 426 Pages
• Weight: 1.25 lbs.
• Dimensions: 0.9" x 6.0" x 9.0"