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Ion Sources 3540657479 Book Cover

Ion Sources

Edition Description

This book is the most comprehensive book on ion sources as part of ion implantation technology, a newly established basic technology for microelectronic device processing. It appeals to physicists, engineers and advanced students active in ion implantation and ion beam physics...

Edition Details
Format:Hardcover
Language:English
ISBN:3540657479
Format: Hardcover
Condition:
$
249.99
Ion Sources 3642085024 Book Cover

Ion Sources

Edition Description

This book is the most comprehensive book on ion sources as part of ion implantation technology, a newly established basic technology for microelectronic device processing. It appeals to physicists, engineers and advanced students active in ion implantation and ion beam physics...

Edition Details
Format:Paperback
Language:English
ISBN:3642085024
Format: Paperback
Condition:
$
249.99
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