Ion Implantation Technology-94: Proceedings of the Tenth International Conference on Ion Implantation Technology Catania, Italy, June 13-17, 1994

By Italy) International Conference on Ion Implantation Technology (10th : 1994 : Catania

The aim of these proceedings is to present the many subjects related to ion implantation. The presentations in this volume cover areas such as: trends in processing and devices; ion-solid interaction; materials science issues; advanced implanter systems; and future trends and applications.

• Format: Hardcover
• Language: English
• ISBN: 0444821945
• ISBN13: 9780444821942
• Release Date: January 1995
• Publisher: North-Holland
• Length: 1012 Pages
• Weight: 5.70 lbs.
• Dimensions: 11.0" x 2.0" x 8.3"