Ion Implantation: Basics to Device Fabrication

by Emanuele Rimini

Book Overview

Ion implantation offers one of the best examples of a topic that starting from the basic research level has reached the high technology level within the framework of microelectronics. As the major or... This description may be from another edition of this product.

• Format: Hardcover
• Language: English
• ISBN: 0792395204
• ISBN13: 9780792395201
• Release Date: December 1994
• Publisher: Springer
• Length: 393 Pages
• Weight: 1.64 lbs.
• Dimensions: 0.9" x 6.1" x 9.2"