Investigations on Magnetron Sputtered Tantalum Oxide Films

By S. V. Jagadeesh Chandra

High permittivity dielectrics are studied intensively in the view of their use in the integrated circuits. However, the real emergence of tantalum oxide (Ta2O5) as a dielectric material happened due... This description may be from another edition of this product.

• Format: Paperback
• Language: English
• ISBN: 3843394229
• ISBN13: 9783843394222
• Release Date: January 2011
• Publisher: LAP Lambert Academic Publishing
• Length: 188 Pages
• Weight: 0.62 lbs.
• Dimensions: 0.4" x 6.0" x 9.0"