A new 14.5 GHz all-permanent magnet ECR ion source has been developed and investigated at the Institut f?r Allgemeine Physik, Vienna University of Technology. A new experimental setup for the measurement of total single electron capture cross sections has been designed, simulated and used for some collision experiment. Measurements of resonance charge exchange (single electron capture) cross sections for Ar+-Ar and Ne+- Ne collisions at low impact energy (0.1 - 1 keV) have been carried out in order to test the reliability and accuracy of the new apparatus, since accurate calculated and measured data for the respective cross sections are readily available from the literature. Our data were found in good agreement with earlier published data in this energy range.
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