Introduction to Semiconductor Manufacturing Technology

By Xiao Hong

IC chip manufacturing processes, such as photolithography, etch, CVD, PVD, CMP, ion implantation, RTP, inspection, and metrology, are complex methods that draw upon many disciplines. Introduction to... This description may be from another edition of this product.

• Format: Hardcover
• Language: English
• ISBN: 081949092X
• ISBN13: 9780819490926
• Release Date: October 2012
• Publisher: Society of Photo Optical
• Length: 664 Pages
• Weight: 3.40 lbs.
• Dimensions: 10.5" x 1.8" x 7.5"