
Increasing miniaturization of devices, components, and integrated systems requires developments in the capacity to measure, organize, and manipulate matter at the nanoscale. This textbook, first published in 2007, is a comprehensive, interdisciplinary account of the technology...

Increasing miniaturization of devices, components, and integrated systems requires developments in the capacity to measure, organize, and manipulate matter at the nanoscale. This textbook, first published in 2007, is a comprehensive, interdisciplinary account of the technology...
