Education & Reference Books > Linguistics Books > Introduction to Microlithography (Acs Professional Reference Book)

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Intro Microlith 2ed Acspr C

Edition Description

Updated and expanded Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major topics: the physics of the lithographic process, organic resist materials,...

Edition Details

Format:Hardcover

Language:English

ISBN:0841228485

Format: Hardcover

Condition:

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Intro Microlith 2ed Acspr C

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