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Intro Microlith 2ed Acspr C 0841228485 Book Cover

Intro Microlith 2ed Acspr C

Edition Description

Updated and expanded Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major topics: the physics of the lithographic process, organic resist materials,...

Edition Details
Format:Hardcover
Language:English
ISBN:0841228485
Format: Hardcover
Condition:
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