Intro Microlith 2ed Acspr C

By: Thompson

Updated and expanded Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major topics: the physics of the lithographic process, organic resist materials, resist processing, and plasma etching. Designed as a tutorial for researchers with no experience in the field, as well as those experienced in microlithography. Will also prove invaluable to those already involved in microlithography. Includes numerous references for more detailed reading on specific aspects of microlithography.

• Format: Hardcover
• Language: English
• ISBN: 0841228485
• ISBN13: 9780841228481
• Release Date: May 1994
• Publisher: Academic
• Length: 540 Pages
• Weight: 2.00 lbs.
• Dimensions: 1.4" x 6.0" x 9.2"

Customer Reviews

Excellent!

This book is very fundamental. I'm the novice in semiconduct process. It's a excellent book to me