Introduction to Metrology Applications in IC Manufacturing

By Bo Su, Su Bo, Alok Vaid, et al.

Metrology has grown significantly, especially in semiconductor manufacturing, and such growth necessitates increased expertise. Until now, this field has never had a book written from the perspective... This description may be from another edition of this product.

• Format: Paperback
• Language: English
• ISBN: 1628418117
• ISBN13: 9781628418118
• Release Date: September 2015
• Publisher: SPIE--The International Society for Optical Engineering
• Length: 184 Pages
• Weight: 0.80 lbs.
• Dimensions: 10.0" x 0.5" x 7.0"