Integrated Circuit Mask Technology

By David J. Elliott

This book details the major fabrication steps and many process techniques used to produce high-resolution masks for integrated-circuit fabrication. Processing parameters for the equipment and... This description may be from another edition of this product.

• Format: Hardcover
• Language: English
• ISBN: 0070192618
• ISBN13: 9780070192614
• Release Date: January 1985
• Publisher: McGraw-Hill
• Length: 287 Pages
• Weight: 0.15 lbs.