Microfabrication for Industrial Applications (Micro and Nano Technologies)

By Regina Luttge

Microfabrication for Industrial Applications focuses on the industrial perspective for micro- and nanofabrication methods including large-scale manufacturing, transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. It gives a history of miniaturization, micro- and nanofabrication, and surveys industrial fields of application, illustrating fabrication processes of relevant micro and nano devices.Concerning sub-micron feature manufacture, the book explains: the philosophy of micro/ nanofabrication for integrated circuit industry; thin film deposition; (waveguide, plastic, semiconductor) material processing; packaging; interconnects; stress (e.g., thin film residual); economic; and environmental aspects.Micro/nanomechanical sensors and actuators are explained in depth with information on applications, materials (incl. functional polymers), methods, testing, fabrication, integration, reliability, magnetic microstructures, etc.

• Format: Hardcover
• Language: English
• ISBN: 0815515820
• ISBN13: 9780815515821
• Release Date: September 2011
• Publisher: William Andrew
• Length: 312 Pages
• Weight: 1.80 lbs.
• Dimensions: 9.8" x 1.3" x 7.8"