High-k Gate Dielectrics and Diffusion Barriers in Cu Metallization

By Prodyut Majumder

Scaling of silicon technology has entered an era of material limited device scaling , as fundamental physical limits have been reached with traditional CMOS materials. At the heart of the silicon... This description may be from another edition of this product.

• Format: Paperback
• Language: English
• ISBN: 3659134368
• ISBN13: 9783659134364
• Release Date: June 2012
• Publisher: LAP Lambert Academic Publishing
• Length: 164 Pages
• Weight: 0.55 lbs.
• Dimensions: 0.4" x 6.0" x 9.0"