Science & Math Books > Physics Books > High Density Plasma Sources: Design, Physics, and Performance (Materials Science and Process Technology Series)

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High Density Plasma Sources: Design, Physics an...

By Oleg A. Popov

Edition Description

This book describes the design, physics, and performance of high density plasma sources which have been extensively explored in low pressure plasma processing, such as plasma etching and planarization, plasma enhanced chemical vapor deposition of thin films, sputtered deposition...

Edition Details

Format:Hardcover

Language:English

ISBN:0815513771

Format: Hardcover

Condition:

35.99

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High Density Plasma Sources: Design, Physics an...

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