Handbook of VLSI Microlithography: Principles, Technology and Applications

This handbook gives readers a close look at the entire technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatings--... This description may be from another edition of this product.

• Format: Hardcover
• Language: English
• ISBN: 0815512813
• ISBN13: 9780815512813
• Release Date: January 1991
• Publisher: William Andrew
• Length: 680 Pages
• Weight: 1.55 lbs.
• Dimensions: 1.4" x 6.0" x 9.0"