Handbook of Sputter Deposition Technology: Principles, Technology and Applications (Materials Science and Process Technology Series)

By Shigeru Hayakawa and Kiyotaka Wasa

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• Format: Paperback
• Language: English
• ISBN: 0815512805
• ISBN13: 9780815512806
• Release Date: January 1993
• Publisher: William Andrew
• Length: 316 Pages
• Weight: 1.65 lbs.
• Dimensions: 9.8" x 1.3" x 6.5"