Handbook of Silicon Wafer Cleaning Technology

by Karen A. Reinhardt

The second Edition of the Handbook of Silicon Wafer Cleaning Technolog y is intended to provide knowledge of wet, plasma, and other surface conditioning techniques used to manufacture integrated... This description may be from another edition of this product.

• Format: Hardcover
• Language: English
• ISBN: 0815515545
• ISBN13: 9780815515548
• Release Date: January 2008
• Publisher: William Andrew
• Length: 748 Pages
• Weight: 2.60 lbs.
• Dimensions: 1.7" x 6.3" x 9.2"