Handbook of Silicon Semiconductor Metrology

Book Overview

Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay, acoustic film thickness, dopant dose, junction depth, and electrical measurements; particle and defect detection; and flatness following chemical mechanical polishing. Providing examples of well-developed metrology capability, the book focuses on metrology for lithography, transistor, capacitor, and on-chip interconnect process technologies.

• Format: Hardcover
• Language: English
• ISBN: 0824705068
• ISBN13: 9780824705060
• Release Date: June 2001
• Publisher: CRC Press
• Length: 894 Pages
• Weight: 3.10 lbs.
• Dimensions: 1.8" x 7.3" x 10.1"