Handbook of Semiconductor Manufacturing Technology

The Handbook of Semiconductor Manufacturing Technology describes the individual processes and manufacturing control, support, and infrastructure technologies of silicon-based integrated-circuit manufacturing, many of which are also applicable for building devices on other semiconductor substrates. Discussing ion implantation, rapid thermal processing, photomask fabrication, chip testing, and plasma etching, the editors explore current and anticipated equipment, devices, materials, and practices of silicon-based manufacturing. The book includes a foreword by Jack S. Kilby, cowinner of the Nobel Prize in Physics 2000 "for his part in the invention of the integrated circuit."

• Format: Hardcover
• Language: English
• ISBN: 0824787838
• ISBN13: 9780824787837
• Release Date: August 2000
• Publisher: CRC Press
• Length: 1157 Pages
• Weight: 6.30 lbs.
• Dimensions: 2.4" x 6.3" x 9.1"

Customer Reviews

Get this handbook! Nothing will ever come close to it.

I'm new to the semiconductor manufacturing business. Getting this book is definitely the right thing I've done. This book provides all the things i wanted to know about semiconductor manufacturing. With over 1100 pages, this book is hard to resist. It covers almost all the technology required for making semiconductor IC. Even though it does not give much details, but the coverage of the topic is sufficient. In addition, the generousity of the authors to provide ample references at the end of each chapter is amazing. One will have plenty of time to search through the references for further info. I suggest that people who are in the semiconductor manufacturing field to get their hands on it. One thing that can be improved regarding to the presentation of this handbook, is the way the diagrams are displayed. Maybe the publisher should consider printing them in glossy paper as some diagrams looks very poor as if they just come out from the photocopy machine.