Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography (SPIE Press Monograph Vol. PM39)

By P. Rai-Choudhury

UK This description may be from another edition of this product.

• Format: Hardcover
• Language: English
• ISBN: 0819423785
• ISBN13: 9780819423788
• Release Date: March 1997
• Publisher: Society of Photo-Optical Instrumentation Engineers
• Length: 768 Pages
• Weight: 3.20 lbs.
• Dimensions: 10.5" x 2.0" x 7.5"