Handbook of Ion Implantation Technology

By J.F. Ziegler

Hardbound. Ion implantation is the primary technology which is used in the semiconductor industry to introduce impurities into semiconductors to form devices and VLSI circuits. All VLSI manufacturing includes ion implantation steps. The technology has universal acceptance because of the accuracy of the number of implanted atoms, and the uniformity of the implantation across large semiconductor wafers. This book is a tutorial presentation of the physics, processes, technology and operation of ion implantation. Its purpose is to serve as a teaching manual, a source book of relevant data, and a compilation of comments from some of the world's most experienced practitioners of ion implantation.The primary problems in using ion implantation in VLSI processing are wafer cooling, dielectric charging, particulate contamination and process control. Each of these problems is addressed in a separate chapter. Each section is described from first principles in

• Format: Hardcover
• Language: English
• ISBN: 0444897356
• ISBN13: 9780444897350
• Release Date: September 1992
• Publisher: North Holland
• Length: 700 Pages
• Weight: 3.90 lbs.
• Dimensions: 10.0" x 1.5" x 6.8"