Handbook of Compound Semiconductors: Growth, Processing, Characterization, and Devices (Materials Science and Process Technology Series)

By Gary E. McGuire and Paul H. Holloway

This book reviews recent advances and current technologies used to produce micro-electronic and optoelectronic devices from both III-V and II-VI compound semiconductors. The emphasis is on the gallium arsenide and indium phosphide-based III-V materials, however, other III-V and some of the II-VI materials are also discussed. The chapters provide a complete overview of the technologies necessary to grow bulk single crystal substrates, grow hetero or homoepitaxially films, and process advanced devices such as HBT's QW diode lasers, etc. The epitaxial growth techniques of metal-organic chemical vapor deposition and molecular beam epitaxy are reviewed. Processing technologies for electrical contracts, dielectric isolation, and interface passivation are described. Processing procedures for ion implantation, wet and dry etching, rapid thermal processing and epitaxial lift-off are described. Techniques to characterize the materials and devices by electronics, ions, and photons are described, and a summary is given of microelectronic and optoelectronic devices, along with their packaging. Molecular Beam Epitaxy Physical and Chemical Deposition of Metals as Ohmic Contacts to InP and Related Materials Surface Processing of III-V Semiconductors Ion Implantation Induced Extended Defects in GaAs Passivation of GaAs and InP Wet and Dry Etching of Compound Semiconductors Rapid Isothermal Processing (RIP) Epitaxial Lift-Off for Thin Film Compound Semiconductor Devices Packaging Chemical, Structural and Electronic Characterization of Compound Semiconductor Surfaces and Interfaces by X-ray Photoelectron Spectroscopy and Diffraction Techniques Characterization of Compound Semiconductor Material by Ion Beams Optical Characterization of Compound Semiconductors Gallium Arsenide Microelectronic Devices and Circuits Optoelectronics Devices

• Format: Hardcover
• Language: English
• ISBN: 0815513747
• ISBN13: 9780815513742
• Release Date: January 1997
• Publisher: William Andrew
• Length: 926 Pages
• Weight: 3.90 lbs.
• Dimensions: 9.8" x 2.5" x 6.8"