Growth and Characterization of ITO thin film by Magnetron Sputtering

By Öcal Tuna

In this study Indium Tin Oxide (ITO) thin films were grown by both DC and RF magnetron sputtering techniques. To know deposition rate of ITO, system was calibrated for both DCMS and RFMS and then ITO... This description may be from another edition of this product.

• Format: Paperback
• Language: English
• ISBN: 3838365690
• ISBN13: 9783838365695
• Release Date: May 2010
• Publisher: LAP Lambert Academic Publishing
• Length: 100 Pages
• Weight: 0.35 lbs.
• Dimensions: 0.2" x 6.0" x 9.0"