Green Etching Techniques for MEMS Applications: Sustainable, Fluorine-Free Etching Methods for Micro-Electro-Mechanical Systems

By Kaying Wang

Green Etching Techniques for MEMS Applications: Sustainable, Fluorine-Free Etching Methods for Micro-Electro-Mechanical Systems delivers an essential and comprehensive exploration of sustainable, fluorine-free etching methodologies for micro-electro-mechanical systems (MEMS). With growing environmental concerns around traditional MEMS fabrication, this book addresses a critical issue by detailing advanced, eco-friendly alternatives that mitigate environmental impacts without compromising technical performance. Covering a spectrum of innovative etching technologies, from dry and wet chemistries to electrochemical and AI-enhanced hybrid methods, the book offers practical guidance, robust theoretical foundations, and insights from real-world industrial case studies. It is a crucial resource for professionals, researchers, and students dedicated to advancing the sustainability of MEMS fabrication.

Features:

Thorough analysis of fluorine-free, environmentally friendly MEMS etching alternatives Coverage of emerging technologies, including supercritical CO₂, ionic liquids, and gas-phase selective etching Exploration of AI-driven process optimization for sustainable and efficient MEMS manufacturing Detailed industrial case studies highlighting successful implementation and scalability Clear discussions on regulatory drivers, market trends, and future roadmaps for sustainable microfabrication

• Format: Hardcover
• Language: English
• ISBN: 1041144962
• ISBN13: 9781041144960
• Release Date: December 2025
• Publisher: CRC Press
• Length: 122 Pages
• Weight: 0.82 lbs.
• Dimensions: 0.4" x 6.1" x 9.2"